Key features:
- Extensive database of predefined customer proven and ready to use applications.
- Large material database which benefits from SENTECH's spectroscopic ellipsometer experience.
- Measurement of dielectrics on semiconductors, semiconductors on semiconductors, polymers on silicon, films on transparent substrates, films on metallic substrates.
- AutoModel option which allows the ability to distinguish between your every day applications.
More features:
- Measures the thickness and refractive index of transparent and weakly absorbing films on reflective and glass substrates
- Menu driven software ensures easy operation
- An entire spectrum can be measured in less than 300 ms
- 32bit software runs under WinNT, Win2000, WinXP on any modern notebook or desktop PC
- Measurement can be set on continuous
- Measures film thickness from 50 nm up to 20000 nm with high accuracy and reproducibility
- Ease of use is built in with predefined applications
- Any layer from a multilayer sample can also be measured
- Statistical analysis, measured values and sample/operator identification are all output in a protocol which can be printed and/or stored on disk
- Additional mapping software is available to control a motor driven sample stage
- The lateral distribution of the film thickness, the reflectivity (at constant wavelength) or the position (wavelength axis) of a spectral peak, can be measured and displayed using the available plot options.
- Can be used with or without a microscope; normal incident white light is used.
| Technical Specifications |
| Measurement time typ. | 300 ms |
| Thickness range | 50 - 25000 nm |
| Accuracy (for 0.4 micron thick film) | 1 nm |
| Precision (for 0.4 micron thick film) | 0.3 nm (1 sigma) |
| Measurement spot with microscope (FTPadv-1) | 80 microns diameter for 10x lens magnification |
| Measurement spot without microscope (FTPadv-2) | approximately 2-4 mm diameter (depending on sample-objective lens distance) |
| Light source (for measurement without microscope) Measurement at normal incidence | stabilized 20 W halogen light source, fiber optic connection for illumination and reflection |
Please contact us for more information.
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