SENTECH’s FTPadvanced reflectometer is a highly accurate instrument to measure the spectral reflectance of substrates, single films and layer stacks in the UV-VIS-NIR spectral range. It allows measurement of the thickness and the refraction index of transparent and weakly absorbing films on reflective transparent and absorbing substrates.
Key features:
- Contactless, highly accurate optical reflection measurements at normal incidence
- Broad spectral range from UV to NIR available
- Measurement of reflectance R, film thickness, refractive index
- FTPexpert software for measurement of optical constants of films
- Measurement of composition of epitaxial compound semiconductor films (e.g. AlGaN on GaN)
- Analysis of epitaxial layer stacks
Options:
- Spectral extension to the DUV (200 nm)
- Spectral extension to the NIR (1700 nm)
- x-y mapping stage and mapping software
- video camera
- state of the art PC
| Technical Specifications |
| Spectral range | 240 nm … 800 nm (optional extension 200 nm … 1700 nm) |
| Measurement time | typical 300 ms |
| Spot size | 0.5mm |
| Measured value | Reflectance R |
| Accuracy | better 0.005 |
| Measured value | film thickness |
| Thickness range | 5 nm … 50 µm |
| Accuracy | better 1 nm (for 400 nm SiO2 on Si) or less than 1% (for layers > 1000 nm) |
| Precision | 0.3 nm (for 400 nm SiO2 on Si) |
| Measured value | refractive index |
| Accuracy | better 0.01 |
| Software | SENTECH’s comprehensive software for recipe oriented operation FTPexpert, including measurement and fit of spectra, display and reporting of results, model editor and large material library |
| Operation Software | Windows XP |
Please contact us for more information.
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