spectroscopic ellipsometer for in-line control.
The SE 801 is a high performance fast diode array detector based spectroscopic ellipsometer in the UV/VIS spectral range featuring both fast data acquisition and full spectral resolution. The minimum data acquisition time is 100 ms for 1024 wavelength points. The SE 801 process ellipsometer allows monitoring of kinetic processes (growth and etch processes) of complex sample structures in different ambients.
| Wavelength range | 350 nm - 850 nm (optional 280 nm - 850 nm) |
| Data acquisition time | minimal 100m ms |
| Light source | 75 W Xe arc lamp |
| Detector | diode array, 1024 element |
| Adapter | Kit for mounting at the reactor chamber |
| Sample thickness | Height adjustment of the ellipsometer beam |
| Windows | Strain free windows |
| Software | motorized, Step Scan Analyzer operation modeWindows XP based SpectraRay II software |
Options
- UHV strain free windows
- Additional displacement unit for ellipsometer heads
- Manual goniometer with angle of incidence set in 5° steps and fixed stage with 150 mm sample platform
Please contact us for more information.
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