The SENresearch spectroscopic ellipsometer family is used for thin film and material characterization in R & D.
Spectral range: 190 – 2500 nm
The SENresearch broadband spectroscopic ellipsometer family is designed to meet the requirements in modern research with special emphasis on speed and accuracy for an unmatched variety of applications.
It provides thin film thickness, refractive index, absorption and related properties like material composition, index gradient, surface and interface roughness as well as anisotropic behavior for multi-layer stacks.
The SENresearch family of spectroscopic ellipsometers treats the effects of real world samples like depolarization, non-uniformities, scattering and backside reflection. The SENresearch is operated by SpectraRay II, which is the comprehensive software for data acquisition, modeling, fitting and reporting of ellipsometric, reflection and transmission data.
The Step Scan Analyzer operation mode, super-achromatic monochromator, computer controlled polarizer, fast diode/CCD array detection in the UV-VIS and interferometric modulated detection in the NIR not only adds speed and high signal to noise ratio but also tunes the ellipsometric data acquisition for highest measurement accuracy for each individual application and within the whole (psi, delta) range of 0-90 deg (psi) and 0 – 360 deg (delta).
The SENresearch family allows the measurement of the degree of polarization and compensation for the depolarization effects caused by non-uniform samples, rough surfaces, and focusing angles. Anisotropic samples and materials can be analyzed.
SENTECH’s advanced mapping option allows the measurement of lateral uniformity for complex layer stacks applying full spectra analysis in a short time (min. 5 s per point). The data can be represented as 2D-, 3D- or contour plot using customized mapping patterns. A comprehensive statistics package is available.
Mapping software
The SENresearch family allows the measurement of reflection and transmission data as well. Combined photometric data can be analyzed using SpectraRay II software.
Also available is a motorized goniometer with a broad range of incident angles (20-90 deg) and a cryostat for temperature dependent measurements.
SENresearch specifications:
| Spectral ranges: (* numbers in brackets are optional wavelength extensions) |
| SE 800 | 280 – 850 nm |
| SE 850 | 280 – 1700 (2500) nm |
| SE 800 E | 240 – 930 nm |
| SE 850 E | 240 – 1700 (2500) nm |
| SE 800 DUV | 190 – 930 nm |
| SE 850 DUV | 190 – 1700 (2500) nm |
| Thickness range | 10 nm … 50 µm |
| Polarizer/ analyzer | motorized, Step Scan Analyzer operation mode |
| Compensator | super-achromatic |
| Light sources | Xe arc lamp, Deuterium, Tungsten Halogen (UV-VIS), Tungsten Halogen (NIR) |
| Detection unit | Photometer with diode array / CCD array (UV-VIS), FT-IR spectrometer (NIR) |
| Sample alignment | accurate height and tilt adjustment by auto collimating telescope and microscope |
| Sample size | up to 300 mm wafers |
| Software | SpectraRay II |
Options:
| Goniometer | motorized, 40-90deg, optional 20-90deg |
| Mapping | motorized, from 50 x 50 mm2 to 300 x 300 mm2 and 300 mm r-theta |
| Micro spots | 200 µm spot size, up to 50 µm on request |
| Cryostat | 4 K – 700 K |
| Camera | video camera for sample alignment in lieu of eyepiece, microscopic picture |
| Autofocus | in combination with mapping option |
| Liquid cell | 70deg standard incident angle, optional up to three different incident angles between 50deg and 70deg possible |
Please contact us for more information.
| 
