XRF Analysers

Environmental standards and production facilities continuously require higher performance X-ray fluorescence (XRF) and electron probe micro analysis (EPMA) solutions. These two analytical techniques enable the identification and quantification of elements in materials.

A Unique Technology For Advanced XRF Solutions

Multilayer monochromators are recognized as the standard for the analysis and detection of light elements (from Boron through to Silicon).

Based on its extended experience in multilayer coatings, surface shaping, and advanced metrology, Xenocs has developed a broad range of high performance XRF analyzer optics.

With its unique replication technology, Xenocs has developed new analyzer geometries that lead to improved lower limits of detection and throughput.

Gen 0 Analysers

Gen 0 is Xenocs' range of flat multilayer analysers mostly used for the analysis of light elements in X-ray fluorescence instruments.

This product range benefits from Xenocs core competency in high precision multilayer-coatings with a large number of materials including W, Ni, Mo, Si, C and alloys containing these materials. These coatings can be applied to a variety of different substrates including silicon of various thicknesses and sizes.

Our standard products can be customized with laterally graded d-spacing and Anti Reflection Coating (ARC) in order to further improve the overall system performance in terms of LLD and throughput.

Gen 3 Analysers

Based on their extensive experience in shaping X-ray beams by controlling the spot size, divergence, and spectral purity, Xenocs has developed a new product range of analysers for demanding applications. Successful measurements require high signal, low background, effective second order extinction, and excellent energy resolution. Meeting these requirements lowers the detection limit and leads to higher precision analysis.

At a system level as well, Xenocs doubly focusing analysers lead to improvement. Since the optic creates a small beam spot, the detector entrance can be strongly apertured to limit background noise. Moreover, traditional gasflow detectors can be replaced by more economic small area silicon drift diodes that offer better energy discrimination.

Our Gen 3 aspheric shaped multilayer mirrors are already available for B, N, O, C or As analysis and provide superior performance, allowing fast and accurate analysis.