Application Note - ResiScope II - Local Oxidation Nanolithography of Titanium Thin Films

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Related Product - ResiScope II Electrical Characterisation for AFM

In this application note developed Dr Ángel Pérez del Pino, from the Institute of Materials Science of Barcelona (ICMAB – CSIC) in collaboration with CSI and ScienTec, LON of 10 nm-thick titanium thin films, deposited onto alumina (isolating) substrates by Pulsed Laser Deposition technique, was performed with a 5500LS system implemented with a ResiScope module.

Local current and resistance measurements were made with the Resiscope module producing interesting results.

The scan images below show a) topographic, b) current, c) resistance maps all taken using the ResiScope II module. The numbers in a) indicate the tip velocity in µm/s. Image d) shows the 3D topographic map where colour represents the resistance. Click the link above to download the full application note or click the related product link to read more about the ResiScope II module. Contact us for more information.