Atomic Layer Deposition ALD
Deposition of layers in the nanometer scale
We supply ALD and PEALD tools from Sentech Instruments of Berlin Germany. These tools allow the combination of different thermal and/or plasma enhanced ALD films to multilayer structures.
By combining with Sentech metrology tools we can offer leading edge ultra-fast in-situ monitoring of layer-by-layer film growth using the LD Real Time Monitor as well as wide range spectroscopic ellipsometry.
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