SENresearch 4.0 Spectroscopic Ellipsometer


Home > News > SENresearch 4.0 Spectroscopic Ellipsometer

Related Product - Spectroscopic Ellipsometers

Request More Information
Request Brochure

The SENresearch 4.0 ellipsometer from SENTECH Instruments offers a step change in the field of ellipsometry. SENTECH have expanded their already wide spectral range up to 3,500nm to offer one of if not the widest ranges available on the market. Like it's predecessor The SENresearch 4.0 continues to use FTIR in the NIR range to ensure fast measurement and high resolution. It uses an innovative 2C design to allow cost effective measurement of the full Mueller matrix and importantly for those on a budget the instrument is now fully field upgradeable. This means that options like mapping stages, environmental cells and other upgrades can now be installed on site at a later date with no requirement to return the instrument to SENTECH. Read down for more detailed information about why you should contact us about the SENresearch 4.0 ellipsometer.

SENresearch 4.0 Spectroscopic Ellipsometer

Widest Spectral Range and Highest Spectral Resolution

The SENresearch 4.0 spectroscopic ellipsometer covers one of if not the widest spectral ranges on the market from 190nm (DUV) to 3,500nm (NIR). Each instrument is uniquely configured and so the final range of the instrument can be varied depending on the customer application and budget. SENresearch 4.0 uses fast FTIR ellipsometry for the NIR up to 2,500nm or 3,500nm. It allows SENTECH to provide this broad spectral range with the best signal to noise ratio and high selectable spectral resolution. Silicon films up to 200µm can be measured. The measurement speed of FTIR ellipsometry compares to diode array configurations which are also selectable up to 1,700nm.

No Moving Parts Using Step Scan Analyser Principle (SSA)

During data acquisition there are no moving optical parts in the SENresearch 4.0 ellipsometer. The intensity measurement is decoupled from mechanical movement ensuring the lowest possible signal to noise ratio and the most accurate results. Measurement of very rough samples is possible because of the SSA principle. Fast measurement modes are available for mapping and in situ applications.

New Pyramid Goniometer

The new motorized pyramid goniometer features an angle range from 20 degrees to 100 degrees. Optical encoders ensure high precision and long term stability of angle settings. The arms can be moved independently for scatterometry and angle resolved transmission measurements.

SENresearch 4.0 Spectroscopic Ellipsometer

Other options available on the SENresearch 4.0 are:

Full Mueller Matrix by Innovative 2C Design

Full measurement of the Mueller matrix is now possible using the innovative 2C design (double compensator). This is an extension of the SSA principle and is a field upgradeable, cost effective accessory.

Field Upgradeable Accessories

The ability to now upgrade the ellipsometer without having to return it to SENTECH is a huge benefit of the SENresearch 4.0. This means that you no longer need to think carefully about what you may need in future and have the ellipsometer set-up in the beginning to prepare for this. If you decide a year after buying an ellipsometer that you would like to add a mapping stage or an environmental option then this can easily be done in your own lab by a SENTECH engineer.

SENresearch 4.0 Spectroscopic Ellipsometer

Field upgradeable accessories consist of:

SpectraRay/4 Comprehensive Ellipsometry Software

SpectraRay/4 is a full-featured software package for advanced material analysis. It is made up of the Interactive Mode for research with a guided graphical user interface and a Recipe Mode for routine applications. We receive a lot of complimentary feedback on how powerful and easy to use the SpectraRay/4 software is.

Fully Customizable For Standard and Advanced Applications

SENresearch 4.0 Spectroscopic Ellipsometer

The SENresearch 4.0 can be configured for a range of different applications. Predefined recipes are provided for applications such as:

Request More Information
Request Brochure

The SENresearch 4.0 is one of the most advanced and flexible ellipsometers available in the world today. We are confident about it's performance and welcome you to send samples for analysis if you would like to see for yourself. Customers are also welcome to visit the lab in Berlin and use the SENresearch 4.0 or any other SENTECH tool themselves. Please contact us to talk more about this exciting instrument.