The ST500 profilometer from Nanovea is designed to provide powerful and accurate surface profilometry across a large open stage. The tool is easy to use and can combine a range of optional extras with standard speed or high speed profilometry.
Equipped with a large 400mm x 400mm stage with interchangeable measurement sensors allowing measurement of a wide range of sample geometries both dull and reflective in finish.
Nanovea Inc are based in Irvine, a tech hub of Southern California. They have been redefining standards in quality control and materials development internationally for over a decade. Nanovea’s instruments can be found in renowned education and industrial organisations around the world.
3D non-contact profilometry can be used across a range of different applications to provide vital height data about your samples.
Chromatic Confocal technique uses white light that passes through a series of lenses with high degree of chromatic aberrations. Each wavelength will focus at a different distance creating the vertical measurement range. When a surface of interest is within the measurement range a single wavelength of the white light will be in focus while all others will be out of focus. Only the focused wavelength will pass through the pin hole filter to reach the CCD spectrometer. The physical wavelength measured corresponds to a vertical position. No complex algorithms are used to obtain the height value ensuring accurate results for all surface conditions unlike other techniques.
ST500 Base Specifications | |
X-Y Stage Travel | 400mm x 400mm |
Z-Axis Travel | 50mm motorized (extra manual z-clearance is available) |
X-Y Max Speed | 200mm/s |
Sensor Specifications – Standard Speed | ||||||
Standard Speed | PS1 | PS2 | PS3 | PS4 | PS5 | PS6 |
Max Height Range | 110µm | 300µm | 1.1mm | 3.5mm | 10mm | 24mm |
Working Distance | 3.35mm | 10.8mm | 12.0mm | 16.2mm | 25.9mm | 20mm |
Lateral X-Y Accuracy | 0.9µm | 1.2µm | 2.0µm | 3.0µm | 7.0µm | 8.0µm |
Height Repeatability* | 1.2nm | 2.2nm | 3.4nm | 17nm | 31nm | 41nm |
Sensor Specifications – High Speed | |||
High Speed | LS1 | LS2 | LS3 |
Max Height Range | 200µm | 0.95mm | 3.9mm |
Working Distance | 5.3mm | 18.5mm | 41mm |
Height Repeatability Ra* | 14nm | 21nm | 70nm |
Lateral Accuracy Of Each Point | 1µm | 2µm | 5µm |
Acquisition Rate (points per second) | 384KHz | 384KHz | 384KHz |
*Fixed point measurement on glass. Ra average height variation for 1,200 points (100 sampling).
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