About SENTECH
We have worked with Plasma Process Technology and Thin Film Metrology experts SENTECH for several years, supplying their products to clients within the semiconductor sector.
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January 9, 2025
The fully automated thin film quality control tool, SENTECH SENDURO accuva10 is a measurement tool for quality control in sensors, rf/power devices, SAW filters, and MEMS production. The tool provides reliable and precise measurement of thin film stacks, using spectroscopic reflectometry and ellipsometry. Wafers are loaded from standard cassettes and recipes carry out the quality control measurements. The tool is designed to measure film thicknesses, control deposition processes by measuring refractive indices of thin films, and prepare surface trimming for filters.
SENTECH Instruments of Berlin have been manufacturing tools for thin film metrology and thin film processing since 1990. They are a growing company with a reputation for high quality reliable equipment and excellent service. Their tools are used in applications such as semiconductors, microsystems, photovoltaics, nanotechnology and materials research.
Spectroscopic Ellipsometer
Reflectometer
Pattern Recognition
Edge Grip
Multiple Cassette Stations
SECS/GEM
SENTECH regularly document and publish work using their thin film metrology tools. We keep many of these resources on our website in the form of application notes or publications. These are a great way to learn more about what can be achieved with a Sentech tool.
Other instruments in the SENTECH range of thin film metrology tools.
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