Both thick and thin films can be measured using the SENTECH SENresearch 4.0 spectroscopic ellipsometer. With a spectral range of 190nm in the DUV up to 3,500nm in the NIR the SENresearch 4.0 has one of the widest spectral ranges available in one instrument.
Use of FTIR in the near infrared range allows for a high signal to noise ratio and high spectral resolution. FTIR measurement offers faster measurement of thick films compared to other techniques.
We offer a free sample measurement and demonstration service to customers considering a purchase so please contact us with information about your application.
SENTECH Instruments of Berlin have been manufacturing tools for thin film metrology and processing since 1990. They are a growing company with a reputation for high quality reliable equipment and excellent service.
There are a variety of optional extras that can be added to a SENTECH ellipsometer. Some need to be added during the initial build whilst others can be added on-site by a SENTECH engineer at a later date.
| Optional Extras During Instrument Build | Field Upgradeable Optional Extras | Accessories |
|
Added reflectometer with 80µm spot and software. 300mm motorized mapping stage HV cryostat for optical measurements 80K – 700K |
Auto height and tilt adjustment Transmission sample holder with quick lock 200µm diameter microspots Extension for the measurement of 16 Mueller matrix elements including second compensator, motorized turntable and analysis software 150mm or 200mm motorized mapping stage Computer controlled turntable for measurement of anisotropic samples Adapters for connecting the SENresearch 4.0 ellipsometer arms to a vacuum chamber via CK 40 flanges (stainless steel) |
Liquid cell for in situ measurements Liquid cell heated up to 70°C Heating stages for room temperature to 150°C or 300°C Thin film test wafers 20nm, 100nm, 400nm SiO2 on Si Additional SpectraRay/4 software licenses |
SENTECH regularly document and publish work using their thin film metrology tools. We keep many of these resources on our website in the form of application notes or publications. These are a great way to learn more about what can be achieved with a Sentech tool.
Other instruments in the SENTECH range of thin film metrology tools.
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