The SE400adv ellipsometer is a single wavelength laser ellipsometer. A stabilized HeNe laser guarantees a precision of 0.1Å for thin film measurements of ultra thin single layers.

A manual goniometer allows measurement of film thickness, refractive index and extinction coefficient of single and multilayer stacks.

The SE400adv is designed to be easy to use and to provide fast measurements. In fact the speed of measurements allows users to perform repeating measurements for applications such as film growth tracking and end point detection. The measurement speed also makes sample mapping an attractive option.

SENTECH Instruments of Berlin have been manufacturing tools for thin film metrology and thin film processing since 1990. They are a growing company with a reputation for high quality reliable equipment and excellent service. Their tools are used in applications such as semiconductors, microsystems, photovoltaics, nanotechnology and materials research.

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Key Features

  • Single wavelength laser ellipsometry
  • Sub-Angstrom accuracy
  • Compact desktop instrument
  • Measurement of single and multilayer stacks
  • Easy to use and high speed with mapping options available
  • Variable angle 40° to 90° in steps of 5°
  • Measurement of film thickness, refractive index and extinction coefficient
  • Comprehensive SENTECH materials library for efficient modelling

Options

The SE400adv laser ellipsometer can be equipped with optional extras:

  • Microspots
  • Manual XY stage with 50mm travel
  • Motorised mapping stage (50mm sample diameter)
  • Motorised mapping stage (150mm sample diameter)
  • Motorised mapping stage (200mm sample diameter)
  • Liquid cell
  • Autofocus option in combination with mapping option

All options are modular so can be purchased at a later date if needed.

If you need a quote or would like more information on this product then please get in touch

Other Products in Range

Other instruments in the SENTECH thin film metrology range.

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