The SI591 is an RIE etcher with load lock and a small footprint. It offers excellent process reproducibility and plasma etching process flexibility.

The tool is modular and can accommodate samples up to 200mm diameter. The lab space required can be further reduced by through the wall installation and cluster configuration is possible.

As with all SENTECH tools the SI591 comes with powerful and user friendly control software.

SENTECH Instruments of Berlin have been manufacturing tools for thin film metrology and processing since 1990. They are a growing company with a reputation for high quality reliable equipment and excellent service. 

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Key Features

  • Cost effective and small footprint RIE etch tool with loadlock
  • Flexible and modular design
  • Windows for process monitoring
  • Wafers of up to 200mm
  • Upgradeable with larger pumping unit and additional gas lines
  • Powerful user friendly software

If you need a quote or would like more information on this product then please get in touch

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