SENTECH SENDURO MEMS Automated Spectroscopic

The SENDURO MEMS is a cassette loaded tool for fully automated high throughput metrology quality control. The SENDURO MEMS utilizes both spectroscopic ellipsometry and reflectometry to measure film thickness, refractive index and extinction coefficient of materials relevant to MEMS and sensor fabrication.

Measurements on the SENDURO MEMS are fast, reliable and repeatable. Wafers are automatically loaded from cassette and automatically aligned for height and tilt before being measured.

Advanced edge grip technology means that double sided wafers can be measured whilst protecting the back of the wafers.

SENTECH Instruments of Berlin have been manufacturing tools for thin film metrology and processing since 1990. They are a growing company with a reputation for high quality reliable equipment and excellent service.

Key Features

Fully automated cassette loaded metrology of wafers up to 200mm
Spectroscopic ellipsometry and reflectometry in one tool
Wide range of different spectral resolutions are available depending on requirements
Measurement of thin film thickness, refractive index and extinction coefficient
Measurement of double sided wafers using special edge gripping technology to protect the backside
Mapping options available
Comprehensive SpectraRay/4 measurement software. One of the most powerful packages available on the market so please contact us for a demo
Comprehensive SENTECH materials library for efficient modelling

Example Materials

Measurement of a wide range of materials including but not limited to:

Silicon oxide, silicon nitride, silicon oxynitride
Amorphos silicon, polysilicon
Photoresist, polyimide
Thin metal films of Al, Pt, Cr and conductive films of TiN, TaN, TCO and ITO
Single films and layer stacks of these materials on silicon wafers, silicon-on insulator substrates, silicon membranes, GaN on silicon, SiC and more, used in MEMs and sensor production