The SENDURO MEMS is a cassette loaded tool for fully automated high throughput metrology quality control. The SENDURO MEMS utilizes both spectroscopic ellipsometry and reflectometry to measure film thickness, refractive index and extinction coefficient of materials relevant to MEMS and sensor fabrication.
Measurements on the SENDURO MEMS are fast, reliable and repeatable. Wafers are automatically loaded from cassette and automatically aligned for height and tilt before being measured.
Advanced edge grip technology means that double sided wafers can be measured whilst protecting the back of the wafers.
SENTECH Instruments of Berlin have been manufacturing tools for thin film metrology and processing since 1990. They are a growing company with a reputation for high quality reliable equipment and excellent service.
Measurement of a wide range of materials including but not limited to:
Other instruments in the SENTECH thin film metrology range.
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