The SENDURO MEMS is a cassette loaded tool for fully automated high throughput metrology quality control. The SENDURO MEMS utilizes both spectroscopic ellipsometry and reflectometry to measure film thickness, refractive index and extinction coefficient of materials relevant to MEMS and sensor fabrication.

Measurements on the SENDURO MEMS are fast, reliable and repeatable. Wafers are automatically loaded from cassette and automatically aligned for height and tilt before being measured.

Advanced edge grip technology means that double sided wafers can be measured whilst protecting the back of the wafers.

SENTECH Instruments of Berlin have been manufacturing tools for thin film metrology and processing since 1990. They are a growing company with a reputation for high quality reliable equipment and excellent service. 

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Key Features

  • Fully automated cassette loaded metrology of wafers up to 200mm
  • Spectroscopic ellipsometry and reflectometry in one tool
  • Wide range of different spectral resolutions are available depending on requirements
  • Measurement of thin film thickness, refractive index and extinction coefficient
  • Measurement of double sided wafers using special edge gripping technology to protect the backside
  • Mapping options available
  • Comprehensive SpectraRay/4 measurement software. One of the most powerful packages available on the market so please contact us for a demo
  • Comprehensive SENTECH materials library for efficient modelling

Example Materials

Measurement of a wide range of materials including but not limited to:

  • Silicon oxide, silicon nitride, silicon oxynitride
  • Amorphos silicon, polysilicon
  • Photoresist, polyimide
  • Thin metal films of Al, Pt, Cr and conductive films of TiN, TaN, TCO and ITO
  • Single films and layer stacks of these materials on silicon wafers, silicon-on insulator substrates, silicon membranes, GaN on silicon, SiC and more, used in MEMs and sensor production

If you need a quote or would like more information on this product then please get in touch

Other Products in Range

Other instruments in the SENTECH thin film metrology range.

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